Granite ke e 'ngoe ea lisebelisoa tse tsebahalang haholo tse sebelisoang lisebelisoa tsa semiconductor.Ke mofuta oa lejoe le thata, le tukang le hlahang ka mebala e fapaneng ea bohlooho, bopinki le bosoeu.Granite e tsebahala ka ho tšoarella ha eona, coefficient e tlase ea katoloso ea mocheso, le conductivity e ntle ea mocheso, e e etsa sesebelisoa se loketseng ho sebelisoa lits'ebetsong tsa lisebelisoa tsa semiconductor.
E 'ngoe ea li-subsystem tse ka sehloohong tse sebelisang granite lisebelisoa tsa semiconductor ke tsamaiso ea li-wafer le ho e lokisa.Subsystem ena e bapala karolo ea bohlokoa ts'ebetsong ea tlhahiso ea lisebelisoa tsa semiconductor.Wafer ke karolo e qalang ea sesebelisoa, 'me tsamaiso e ka tlase ea ho sebetsana le ho sebetsa e na le boikarabelo ba ho fetisetsa li-wafers pakeng tsa likamore tse fapaneng le lisebelisoa tsa ho sebetsa.Granite e sebelisoa ho theha libaka tse ts'oarang tse nepahetseng haholo le tse bataletseng 'me e fana ka sethala se tsitsitseng sa ho lokisa liphaphatha.
Setsi se seng sa bohlokoa se sebelisang granite ke vacuum subsystem.Lisebelisoa tsa semiconductor, likamore tsa vacuum li sebelisoa ho qoba tšilafalo nakong ea tlhahiso.E le hore tsamaiso ena e sebetse ka katleho, kamore e tlameha ho koaloa ka ho feletseng, moo granite e kenang tengNtle le moo, ho nepahala ha mochini o phahameng oa granite ho lumella ho theoa ha tiiso e phethahetseng, ho fana ka tikoloho e tšepahalang ea vacuum bakeng sa ts'ebetso ea wafer.
Subsystem ea alignment ke sistimi e 'ngoe ea bohlokoa e sebelisang thepa e ikhethang ea granite.Subsystem ena e na le boikarabello ba ho hokahanya likarolo tse fapaneng tsa lisebelisoa tsa semiconductor ka nepo le ho nepahala.Granite e sebelisoa ho qaptjoa le ho haha mekhahlelo ea ho lumellana ho tiisa ho tiea le botsitso bo phahameng.Boima bo phahameng ba granite bo thusa ho finyella ho nepahala ho phahameng, ho lebisang ho hlahiseng lisebelisoa tse nepahetseng haholo le tse ka tšeptjoang tsa semiconductor.
Qetellong, subsystem ea metrology ke sistimi e 'ngoe ea lisebelisoa tsa semiconductor tse sebelisang granite.Metrology e bapala karolo ea bohlokoa ts'ebetsong ea li-wafer, 'me ho nepahala ha tsamaiso ena e bohlokoa ho netefatsa boleng ba sesebelisoa.Granite e fana ka sethala se tsitsitseng le se thata se thusang ho fokotsa ho thothomela le ho fokotsa phello ea ho fetoha ha mocheso.Sena, le sona, se thusa ho fihlela litekanyo tse nepahetseng haholo tsamaisong ea metrology, e lebisang ho hlahisoeng ha lisebelisoa tsa boleng bo holimo tsa semiconductor.
Qetellong, granite ke sesebelisoa sa bohlokoa ho etsoa ha lisebelisoa tsa semiconductor.E na le thepa e ikhethang joalo ka ho tiea ho hoholo, katoloso e tlase ea mocheso, le ts'ebetso e ntle ea mocheso e e etsa sesebelisoa se setle haholo bakeng sa lisebelisoa tse 'maloa tsa lisebelisoa tsa semiconductor, ho kenyeletsoa ho ts'oaroa le ho sebetsa, vacuum subsystem, alignment subsystem le metrology subsystem.Ho feta moo, tšebeliso ea granite lisebelisoa tsa semiconductor e thusitse ho hlahisa lisebelisoa tse nepahetseng haholo, tse ka tšeptjoang le tse sebetsang hantle tse fetotseng liindasteri tse ngata.
Nako ea poso: Mar-19-2024