Lisebelisoa tsa granite li sebelisoa haholo indastering ea semiconductor ka lebaka la litšobotsi tsa tsona tse babatsehang, tse kang botsitso bo phahameng, katoloso e tlaase ea mocheso, le ho hanyetsa ho hoholo ha kutu.Mehaho ena e etsa hore granite e be thepa e nepahetseng bakeng sa ho aha likarolo tsa boleng bo holimo ka har'a sistimi ea phetisetso ea wafer.
Ts'ebetsong ea tlhahiso ea semiconductor, sistimi ea phetisetso ea li-wafer e bapala karolo ea bohlokoa ho tsamaiseng li-wafers ho pholletsa le mekhahlelo e fapaneng ea ts'ebetso ea tlhahiso.Ho nepahala le ho nepahala ke litlhoko tsa bohlokoa bakeng sa litsamaiso tsena kaha le ho kheloha ho honyenyane ho ka beha ts'ebetso eohle kotsing.Ka hona, likarolo tsa sistimi ea phetisetso ea liphaephe li tlameha ho etsoa ka thepa ea boleng bo holimo, 'me granite e kopana le litekanyetso tseo.
Likarolo tse ling tsa sistimi ea phetisetso ea liphaephe tse entsoeng ka thepa ea granite li kenyelletsa:
1. Vacuum Chuck Tafole
Tafole ea vacuum chuck e sebelisetsoa ho tšoara sephaphatha nakong ea ts'ebetso, 'me e tlameha ho ba le sebaka se tsitsitseng ho netefatsa hore sephaphatha ha se senyehe.Granite ke thepa e loketseng bakeng sa ho etsa tafole ena hobane e na le sebaka se bataletseng, se se nang porous se fanang ka botsitso bo phahameng le ho nepahala.Ho feta moo, granite e na le coefficient e tlase ea katoloso ea mocheso, e etsa hore e hanane le liphetoho tsa mocheso tse ka bakang liphetoho tse nyane ho wafer.
2. Sethala sa ho Beha Moea
Sethala sa ho tsamaisa moea se sebelisetsoa ho tsamaisa sephaphatha ka mekhahlelo e fapaneng ea ts'ebetso ea tlhahiso.Sethala se entsoe ho fana ka motsamao o se nang likhohlano, o hlokang ho nepahala le botsitso bo phahameng.Granite e sebelisoa ts'ebetsong ena hobane ke lejoe le thata ebile le thata, 'me le hanana le deformation le ho senyeha ha nako.
3. Linear Motion Guides
Litataiso tsa motsamao oa mela li sebelisoa ho tataisa sethala sa moea, 'me li tlameha ho beoa ka nepo ho fokotsa liphoso.Granite e sebelisoa ho aha tataiso ena hobane e na le botsitso bo botle ba mochini le matla.Thepa e boetse ha e na kutu, e netefatsang nako e telele ea tsamaiso ea tataiso.
4. Thepa ea Metrology
Lisebelisoa tsa Metrology li sebelisoa ho lekanya boholo le thepa ea sephaphatha nakong ea ts'ebetso ea tlhahiso.Granite ke thepa e loketseng bakeng sa ho aha thepa ena hobane e na le boima bo phahameng, katoloso e tlase, le deformation e nyane ka tlas'a mojaro.Ho feta moo, ho tsitsa ha mocheso oa granite ho netefatsa hore lisebelisoa tsa metrology li lula li tsitsitse ebile li nepahetse ha nako e ntse e ea.
Qetellong, indasteri ea semiconductor e itšetlehile ka ho nepahala le ho nepahala, 'me lisebelisoa tsa granite li ipakile li tšepahala haholo ebile li tsitsitse ts'ebetsong ea tlhahiso.Ka likarolo tse ngata tsa bohlokoa tsamaisong ea phetisetso ea liphaephe tse hlokang botsitso bo phahameng, ho nepahala, le katoloso e tlase ea mocheso, baenjiniere ba fetohetse lisebelisoa tsa granite ho fihlela litlhoko tsena tsa bohlokoa.
Nako ea poso: Mar-19-2024