Lisebelisoa tsa granite li sebelisoa haholo indastering ea semiconductor ka lebaka la litšobotsi tsa tsona tse ntle, tse kang botsitso bo phahameng, katoloso e tlase ea mocheso, le ho hanyetsa mafome haholo. Litšobotsi tsena li etsa hore granite e be thepa e loketseng bakeng sa ho haha likarolo tse nepahetseng haholo tsamaisong ea phetisetso ea wafer.
Ts'ebetsong ea tlhahiso ea semiconductor, sistimi ea phetisetso ea wafer e bapala karolo ea bohlokoa ho tsamaiseng li-wafer ho pholletsa le mekhahlelo e fapaneng ea ts'ebetso ea tlhahiso. Ho nepahala le ho nepahala ke litlhoko tsa bohlokoa bakeng sa litsamaiso tsena kaha esita le ho kheloha ho honyenyane ho ka beha ts'ebetso eohle kotsing. Ka hona, likarolo tse tsamaisong ea phetisetso ea wafer li tlameha ho etsoa ka thepa ea boleng bo holimo, 'me granite e fihlela litekanyetso tseo.
Likarolo tse ling tsa sistimi ea phetisetso ea wafer tse entsoeng ka thepa ea granite li kenyelletsa:
1. Tafole ea Vacuum Chuck
Tafole ea vacuum chuck e sebelisetsoa ho tšoara wafer nakong ea ts'ebetso, 'me e tlameha ho ba le bokaholimo bo tsitsitseng ho netefatsa hore wafer ha e senyehe. Granite ke thepa e loketseng bakeng sa ho etsa tafole ena hobane e na le bokaholimo bo bataletseng, bo se nang masoba bo fanang ka botsitso bo phahameng le ho nepahala. Ho feta moo, granite e na le coefficient e tlase ea katoloso ea mocheso, e leng se etsang hore e hanele liphetoho tsa mocheso tse ka bakang liphetoho tsa boholo ba wafer.
2. Sethaleng sa ho Jara Moea
Mokhahlelo o jereng moya o sebediswa ho tsamaisa wafer ka mekhahlelo e fapaneng ya tshebetso ya tlhahiso. Mokhahlelo o entswe ka boqapi ho fana ka motsamao o se nang kgohlano, o hlokang ho nepahala le botsitso bo hodimo. Granite e sebediswa tshebedisong ena hobane ke lejwe le thata le le thata, mme le hanela ho fetoha le ho tsofala ha nako e ntse e ya.
3. Tataiso ea Motsamao o Molelele
Litataiso tsa motsamao tse otlolohileng li sebelisoa ho tataisa sethala se jereng moea, 'me li tlameha ho beoa hantle ho fokotsa liphoso. Granite e sebelisoa ho haha tataiso ena hobane e na le botsitso le matla a mechini a babatsehang. Thepa ena e boetse e hanela mafome, e leng se netefatsang hore sistimi ea tataiso e tla tšoarella nako e telele.
4. Lisebelisoa tsa Metrology
Lisebelisoa tsa Metrology li sebelisoa ho lekanya litekanyo le thepa ea wafer nakong ea ts'ebetso ea tlhahiso. Granite ke thepa e loketseng bakeng sa ho haha sesebelisoa sena hobane se na le ho tiea ho hoholo, katoloso e tlase, le ho fetoha ho fokolang ha se jarisoa. Ho feta moo, botsitso ba mocheso ba granite bo netefatsa hore lisebelisoa tsa metrology li lula li tsitsitse ebile li nepahetse ha nako e ntse e ea.
Qetellong, indasteri ea semiconductor e itšetlehile ka ho nepahala le ho nepahala, 'me thepa ea granite e ipakile e tšepahala haholo ebile e tsitsitse ts'ebetsong ea tlhahiso. Ka likarolo tse ngata tsa bohlokoa tsamaisong ea phetisetso ea wafer tse hlokang botsitso bo phahameng, ho nepahala le katoloso e tlase ea mocheso, baenjiniere ba retelehetse ho thepa ea granite ho fihlela litlhoko tsena tsa bohlokoa.
Nako ea poso: Hlakubele-19-2024