Lihlahisoa tsa Granite Air Bearing Stage li sebelisoa haholo liindastering tse fapaneng ka lebaka la litšobotsi tsa tsona tse ikhethang le ho nepahala ho hoholo. Mehato ena e etselitsoe ka ho khetheha ho fana ka taolo e boreleli le e nepahetseng ea motsamao, e leng ea bohlokoa lits'ebetsong tse ngata moo ho nepahala le ho nepahala e leng lintlha tsa bohlokoa. Tse ling tsa libaka tsa ts'ebeliso ea lihlahisoa tsa Granite Air Bearing Stage li tšohloa ka tlase.
Liindasteri tsa tlhahiso: Lihlahisoa tsa Granite Air Bearing Stage li sebelisoa haholo indastering ea tlhahiso, haholo-holo tlhahisong ea likarolo tsa semiconductor le tsa elektroniki. Li sebelisoa tlhahisong ea wafer, lithography, tlhahlobong le litekong tsa likarolo tsa semiconductor. Ho nepahala ho hoholo le ho nepahala ha mekhahlelo ena ho nolofalletsa bahlahisi ho hlahisa lihlahisoa tsa boleng bo holimo, e leng se lebisang tlhahisong e eketsehileng le litšenyehelong tse fokotsehileng.
Metrology: Metrology ke saense ea ho lekanya, 'me e bapala karolo ea bohlokoa taolong le netefatsong ea boleng. Lihlahisoa tsa Granite Air Bearing Stage li sebelisoa ho metrology ho lekanya ho nepahala le ho nepahala ha lisebelisoa tse fapaneng. Mehato ena e fana ka motheo o tsitsitseng le o nepahetseng bakeng sa lisebelisoa tsa ho lekanya, e leng se nolofalletsang ho lekanya likarolo tse nyane le tse nepahetseng.
Patlisiso le Nts'etsopele: Patlisiso le nts'etsopele ke sebaka sa bohlokoa moo ho nepahala le ho nepahala ho hlokahalang bakeng sa ho etsa litšibollo tsa saense le boqapi. Lihlahisoa tsa Granite Air Bearing Stage li bapala karolo ea bohlokoa lits'ebetsong tsa lipatlisiso le nts'etsopele tse kang nanotechnology, thepa e tsoetseng pele le biotechnology. Mehato ena e sebelisetsoa ho beha kapa ho tsamaisa lisampole kapa lintho ka ho nepahala ho hoholo, e leng se nolofalletsang bafuputsi ho etsa liteko ka ho nepahala le ho ikatisa hape.
Lifofane le Tšireletso: Liindasteri tsa lifofane le tsa tšireletso li hloka litharollo tsa taolo ea motsamao tse nepahetseng haholo le tse nepahetseng bakeng sa lits'ebetso tse kang liteko le tlhahlobo ea litsamaiso tsa ho tsamaea, litsamaiso tsa tataiso ea limisaele, le li-antenna tsa sathelaete. Lihlahisoa tsa Granite Air Bearing Stage li sebelisoa lits'ebetsong tsena hobane li fana ka motheo o tsitsitseng le o nepahetseng bakeng sa liteko le tlhahlobo.
Indasteri ea bongaka: Indastering ea bongaka, ho nepahala le ho nepahala ke tsa bohlokoa ka ho fetisisa, 'me lihlahisoa tsa Granite Air Bearing Stage li bapala karolo ea bohlokoa lits'ebetsong tse kang tlhahiso ea lisebelisoa tsa bongaka, phekolo ea mahlaseli, le lisebelisoa tsa ho hlahloba litšoantšo. Mehato ena e fana ka motheo o tsitsitseng le o nepahetseng oa ho beha le ho tsamaisa lisebelisoa kapa lisampole tsa bongaka, e leng se nolofalletsang lingaka le bafuputsi ho etsa lits'ebetso ka ho nepahala le ho nepahala haholoanyane.
Qetello: Lihlahisoa tsa Granite Air Bearing Stage li na le mekhoa e mengata 'me li sebelisoa haholo liindastering tse fapaneng ka lebaka la litšobotsi tsa tsona tse ikhethang tse kang ho nepahala le ho nepahala ho hoholo. Libaka tsa ts'ebeliso tse tšohliloeng kaholimo ke mehlala e 'maloa feela ea liindasteri tse ngata tse ka ruang molemo ka ho sebelisa mekhahlelo ena. Ha theknoloji e ntse e tsoela pele le tlhoko ea ho nepahala le ho nepahala ho hoholo e ntse e eketseha, mekhahlelo ena e tla tsoela pele ho bapala karolo ea bohlokoa liindastering tse ngata.
Nako ea poso: Mphalane-20-2023
