Granite ke thepa e tsebahalang indastering ea ho etsa li-wafer ka lebaka la thepa ea eona e ikhethang ea mochini le ho tšoarella nako e telele. Ke lejoe la tlhaho le chekoang ho tloha likoring lefatšeng ka bophara 'me le 'nile la sebelisoa ka lilemo tse makholo bakeng sa merero e fapaneng ea kaho, ho kenyelletsa le ho etsa thepa ea semiconductor. Sehloohong sena, re tla tšohla thepa ea granite le lits'ebetso tsa eona tse fapaneng ho lisebelisoa tsa ho lokisa li-wafer.
Thepa ea Granite
Granite ke lefika le chesang le entsoeng ka mica, feldspar le quartz. E tsebahala ka matla a eona a ikhethang, ho thatafala le ho tšoarella nako e telele, ho e etsa sesebelisoa se loketseng bakeng sa lits'ebetso tse hlokang ho nepahala le ho nepahala ho phahameng. Granite e na le coefficient e tlase ea ho atolosoa ha mocheso, ho bolelang hore ha e atolohe kapa ha e fokotsehe ka lebaka la ho fetoha ha mocheso, ho etsa hore e be e tsitsitseng haholo. Ho feta moo, granite ha e khone ho bola le lik'hemik'hale, e leng se etsang hore e be thepa e loketseng ho sebelisoa libakeng tse thata.
Lisebelisoa tsa Granite ka har'a lisebelisoa tsa ho sebetsa ka Wafer
Granite ke thepa e sebelisoang haholo indastering ea ho etsa li-wafer ka lebaka la motsoako oa eona o ikhethang oa thepa. Tse latelang ke tse ling tsa ts'ebeliso ea granite lisebelisoa tsa ho lokisa li-wafer:
1. Lisebelisoa tsa Metrology
Granite hangata e sebelisoa ha ho etsoa lisebelisoa tsa metrology, joalo ka mechini e lekanyang e hokahanyang (CMMs) le lisebelisoa tsa ho metha ka mahlo. Lisebelisoa tsena li hloka libaka tse tsitsitseng tse khonang ho hanela ho thothomela le mocheso. Ho satalla ho phahameng le katoloso e tlase ea mocheso oa granite e etsa hore e be thepa e loketseng lits'ebetso tse joalo.
2. Wafer Chucks
Li-wafer chucks li sebelisoa ho tšoara li-wafers nakong ea ts'ebetso ea tlhahiso. Li-chucks tsena li hloka sebaka se bataletseng le se tsitsitseng ho thibela sephaphatha hore se se ke sa khopama kapa se kobeha. Granite e fana ka sebaka se bataletseng se tsitsitseng haholo ebile se hanana le ho loana, se etsa hore e be thepa e ntle haholo bakeng sa li-wafer chucks.
3. Lisebelisoa tsa Mechanical Polishing (CMP).
Lisebelisoa tsa CMP li sebelisoa ho bentša li-wafers nakong ea ts'ebetso ea tlhahiso. Lisebelisoa tsena li hloka sethala se tsitsitseng se ka hanyetsang ho thothomela le mocheso. Ho satalla ho hotle le katoloso e tlase ea mocheso oa granite e etsa hore e be thepa e loketseng lisebelisoa tsa CMP.
4. Thepa ea Tlhahlobo ea Wafer
Lisebelisoa tsa ho hlahloba li-wafer li sebelisetsoa ho lekola li-wafer bakeng sa mefokolo le liphoso. Lisebelisoa tsena li hloka sebaka se tsitsitseng le se bataletseng ho netefatsa litekanyo tse nepahetseng. Granite e fana ka sebaka se tsitsitseng le se bataletseng se hanyetsanang le ho loana, e leng se etsang hore e be thepa e loketseng bakeng sa lisebelisoa tsa ho hlahloba liphaphatha.
Qetello
Qetellong, granite ke thepa e sebelisoang haholo indastering ea ho etsa li-wafer ka lebaka la thepa ea eona e ikhethang le ho tšoarella nako e telele. E sebelisoa hangata ha ho etsoa lisebelisoa tsa metrology, li-wafer chucks, lisebelisoa tsa CMP, le lisebelisoa tsa tlhahlobo ea wafer. Motsoako o ikhethang oa thepa o etsa hore e be thepa e loketseng bakeng sa lits'ebetso tse hlokang ho nepahala le ho nepahala ho phahameng. Ka melemo ea eona e mengata, granite e ntse e le khetho e tsebahalang bakeng sa lisebelisoa tsa ho lokisa li-wafer, 'me tšebeliso ea eona e kanna ea tsoela pele ho hola nakong e tlang.
Nako ea poso: Dec-27-2023