Granite ke thepa e tsebahalang indastering ea ho sebetsana le li-wafer ka lebaka la thepa ea eona e ikhethang ea mechini le ho tšoarella. Ke lejoe la tlhaho le epolloang liemahaleng lefatšeng ka bophara 'me le sebelisitsoe ka makholo a lilemo bakeng sa merero e fapaneng ea kaho, ho kenyeletsoa le tlhahiso ea lisebelisoa tsa semiconductor. Sehloohong sena, re tla tšohla thepa ea granite le ts'ebeliso ea eona e fapaneng lisebelisoa tsa ho sebetsana le li-wafer.
Matlotlo a Granite
Granite ke lefika le nang le mouoane le entsoeng ka mica, feldspar le quartz. E tsebahala ka matla a eona a ikhethang, ho thatafala le ho tšoarella, e leng se etsang hore e be thepa e loketseng bakeng sa lits'ebetso tse hlokang ho nepahala le ho nepahala ho hoholo. Granite e na le coefficient e tlase ea katoloso ea mocheso, e leng se bolelang hore ha e atolohe kapa ho honyela ka lebaka la liphetoho tsa mocheso, e leng se etsang hore e be e tsitsitseng haholo. Ho feta moo, granite e hanela mafome le lik'hemik'hale, e leng se etsang hore e be thepa e loketseng bakeng sa tšebeliso libakeng tse thata.
Litšebeliso tsa Granite ho Lisebelisoa tsa ho Sebetsa tsa Wafer
Granite ke thepa e sebelisoang haholo indastering ea ho sebetsana le wafer ka lebaka la motsoako oa eona o ikhethang oa thepa. Tse latelang ke tse ling tsa lits'ebetso tsa granite lisebelisoa tsa ho sebetsana le wafer:
1. Lisebelisoa tsa Metrology
Granite e sebediswa haholo tlhahisong ya disebediswa tsa metrology, tse kang mechine ya ho lekanya ya coordinate (CMMs) le ditsamaiso tsa ho lekanya tsa optical. Disebediswa tsena di hloka bokahodimo bo tsitsitseng bo ka hanelang ho thothomela le mocheso. Ho tiya ho hoholo le katoloso e tlase ya granite e etsa hore e be thepa e loketseng bakeng sa ditshebediso tse jwalo.
2. Li-chuck tsa Wafer
Li-chuck tsa wafer li sebelisetsoa ho tšoara li-wafer nakong ea ts'ebetso ea tlhahiso. Li-chuck tsena li hloka bokaholimo bo bataletseng le bo tsitsitseng ho thibela wafer hore e se ke ea kobeha kapa ea kobeha. Granite e fana ka bokaholimo bo bataletseng bo tsitsitseng haholo le bo hanelang ho kobeha, e leng se etsang hore e be thepa e ntle bakeng sa li-chuck tsa wafer.
3. Lisebelisoa tsa ho Sebedisa Mechine ea Lik'hemik'hale (CMP)
Lisebelisoa tsa CMP li sebelisoa ho bentša li-wafer nakong ea ts'ebetso ea tlhahiso. Lisebelisoa tsena li hloka sethala se tsitsitseng se ka hanelang ho thothomela le mocheso. Ho tiea ho babatsehang le katoloso e tlase ea granite mochesong ho etsa hore e be thepa e loketseng lisebelisoa tsa CMP.
4. Lisebelisoa tsa Tlhahlobo ea Wafer
Lisebelisoa tsa tlhahlobo ea wafer li sebelisetsoa ho hlahloba li-wafer bakeng sa liphoso le mefokolo. Lisebelisoa tsena li hloka bokaholimo bo tsitsitseng le bo bataletseng ho netefatsa litekanyo tse nepahetseng. Granite e fana ka bokaholimo bo tsitsitseng le bo bataletseng bo hanelang ho sotha, e leng se etsang hore e be thepa e loketseng bakeng sa lisebelisoa tsa tlhahlobo ea wafer.
Qetello
Qetellong, granite ke thepa e sebelisoang haholo indastering ea ho sebetsana le wafer ka lebaka la thepa ea eona e ikhethang ea mechine le ho tšoarella. E sebelisoa hangata tlhahisong ea lisebelisoa tsa metrology, li-wafer chucks, lisebelisoa tsa CMP, le lisebelisoa tsa tlhahlobo ea wafer. Motsoako o ikhethang oa thepa o etsa hore e be thepa e loketseng bakeng sa lits'ebetso tse hlokang ho nepahala le ho nepahala ho hoholo. Ka melemo ea eona e mengata, granite e ntse e le khetho e tsebahalang bakeng sa lisebelisoa tsa ho sebetsana le wafer, 'me tšebeliso ea eona e ka tsoela pele ho hola nakong e tlang.
Nako ea poso: Tshitwe-27-2023