♦Alumina (Al)2O3)
Likarolo tsa letsopa tse nepahetseng tse hlahisitsoeng ke ZhongHui Intelligent Manufacturing Group (ZHHIMG) li ka etsoa ka thepa e tala ea letsopa e hloekileng haholo, 92 ~ 97% ea alumina, 99.5% ea alumina, >99.9% ea alumina, le khatello ea isostatic e batang ea CIP. Ho sintering le ho sebetsa ka mokhoa o nepahetseng oa mocheso o phahameng, ho nepahala ha litekanyo tsa ± 0.001mm, boreledi ho fihlela ho Ra0.1, ho sebelisa mocheso ho fihlela ho likhato tse 1600. Mebala e fapaneng ea letsopa e ka etsoa ho latela litlhoko tsa bareki, tse kang: botšo, bosweu, beige, bofubelu bo lefifi, jj. Likarolo tsa letsopa tse nepahetseng tse hlahisitsoeng ke k'hamphani ea rona li hanela mocheso o phahameng, mafome, ho tsofala le ho kenya mocheso, 'me li ka sebelisoa nako e telele tikolohong ea khase e chesang, ea vacuum le e senyang.
E sebelisoa haholo disebedisweng tse fapaneng tsa tlhahiso ya di-semiconductor: Diforeimi (bracket ya ceramic), Substrate (base), Arm/Bridge (manipulator), , Dikarolo tsa Mekaniki le Ceramic Air Bearing.
| Lebitso la Sehlahisoa | Bohloeki bo Phahameng ba 99 Alumina Ceramic Square Tube / Pipe / Rod | |||||
| Index | Yuniti | 85% Al2O3 | 95% Al2O3 | 99% Al2O3 | 99.5% Al2O3 | |
| Botenya | g/cm3 | 3.3 | 3.65 | 3.8 | 3.9 | |
| Ho Monya Metsi | % | <0.1 | <0.1 | 0 | 0 | |
| Mocheso o Sintered | ℃ | 1620 | 1650 | 1800 | 1800 | |
| Bothata | Mohs | 7 | 9 | 9 | 9 | |
| Matla a ho Koba (20℃)) | Mpa | 200 | 300 | 340 | 360 | |
| Matla a Khatello | Kgf/cm2 | 10000 | 25000 | 30000 | 30000 | |
| Mocheso o Sebetsang oa Nako e Telele | ℃ | 1350 | 1400 | 1600 | 1650 | |
| Mocheso o Sebetsang o Phahameng | ℃ | 1450 | 1600 | 1800 | 1800 | |
| Ho hanyetsa molumo | 20℃ | Ω. cm3 | >1013 | >1013 | >1013 | >1013 |
| 100℃ | 1012-1013 | 1012-1013 | 1012-1013 | 1012-1013 | ||
| 300℃ | >109 | >1010 | >1012 | >1012 | ||
Tšebeliso ea li-ceramics tsa alumina tse hloekileng haholo:
1. E sebelisoa ho lisebelisoa tsa semiconductor: ceramic vacuum chuck, seha disc, ho hloekisa disc, ceramic CHUCK.
2. Likarolo tsa phetiso ea wafer: li-chuck tsa ho sebetsana le wafer, li-disc tsa ho seha wafer, li-disc tsa ho hloekisa wafer, likopi tsa ho monya oa wafer optical.
3. Indasteri ea ponts'o ea LED / LCD e bataletseng: nozzle ea ceramic, disc ea ceramic silling, LIFT PIN, PIN rail.
4. Puisano ea mahlo, indasteri ea letsatsi: lipeipi tsa letsopa, lithupa tsa letsopa, li-scraper tsa letsopa tse hatisang skrineng sa boto ea potoloho.
5. Likarolo tse hanelang mocheso le tse sireletsang motlakase: li-bearing tsa ceramic.
Hona jwale, diseramike tsa aluminium oxide di ka arolwa ka bohloeki bo hodimo le diseramike tse tlwaelehileng. Letoto la diseramike tsa aluminium oxide tse hlwekileng haholo le bolela thepa ya ceramic e nang le ho feta 99.9% Al₂O₃. Ka lebaka la mocheso wa yona o tjhesang wa ho fihla ho 1650 - 1990°C le bolelele ba yona ba phetiso ba 1 ~ 6μm, hangata e sebetswa ka khalase e kopantsweng ho ena le platinum crucible: e ka sebediswang e le tube ya sodium ka lebaka la phetiso ya yona ya lesedi le ho hanyetsa tshepe ya alkali. Indastering ya dieleketeroniki, e ka sebediswa e le thepa e sireletsang maqhubu a hodimo bakeng sa di-substrate tsa IC. Ho ya ka dikahare tse fapaneng tsa aluminium oxide, letoto la diseramike tsa aluminium oxide tse tlwaelehileng le ka arolwa ka diseramike tse 99, diseramike tse 95, diseramike tse 90 le diseramike tse 85. Ka dinako tse ding, diseramike tse nang le 80% kapa 75% ya aluminium oxide le tsona di arolwa e le letoto la diseramike tsa aluminium oxide tse tlwaelehileng. Har'a tsona, thepa ea ceramic ea aluminium oxide e 99 e sebelisoa ho hlahisa tube ea sebōpi e chesang haholo, e thibelang mollo le thepa e khethehileng e sa tsofaleng, joalo ka li-bearing tsa ceramic, litiiso tsa ceramic le lipoleiti tsa valve. Li-ceramic tsa aluminium tse 95 li sebelisoa haholo-holo e le karolo e thibelang ho tsofala e sa tsofaleng. Li-ceramic tse 85 hangata li tsoakoa ka thepa e itseng, ka hona li ntlafatsa ts'ebetso ea motlakase le matla a mechini. E ka sebelisa molybdenum, niobium, tantalum le litiiso tse ling tsa tšepe, 'me tse ling li sebelisoa e le lisebelisoa tsa motlakase tsa vacuum.
| Ntho ea Boleng (Boleng ba Moemeli) | Lebitso la Sehlahisoa | AES-12 | AES-11 | AES-11C | AES-11F | AES-22S | AES-23 | AL-31-03 | |
| Sebopeho sa Lik'hemik'hale Sehlahisoa se Bonolo sa ho Sintering se nang le Sodium e Tlase | H₂O | % | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 |
| Ha ha ha | % | 0.1 | 0.2 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | |
| Fe₂0₃ | % | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | |
| SiO₂ | % | 0.03 | 0.03 | 0.03 | 0.03 | 0.02 | 0.04 | 0.04 | |
| Na₂O | % | 0.04 | 0.04 | 0.04 | 0.04 | 0.02 | 0.04 | 0.03 | |
| MgO* | % | - | 0.11 | 0.05 | 0.05 | - | - | - | |
| Al₂0₃ | % | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | |
| Bophara ba Likaroloana tse Mahareng (MT-3300, mokhoa oa tlhahlobo ea laser) | μm | 0.44 | 0.43 | 0.39 | 0.47 | 1.1 | 2.2 | 3 | |
| Boholo ba kristale ea α | μm | 0.3 | 0.3 | 0.3 | 0.3 | 0.3 ~ 1.0 | 0.3 ~ 4 | 0.3 ~ 4 | |
| Ho theha Botenya** | g/cm³ | 2.22 | 2.22 | 2.2 | 2.17 | 2.35 | 2.57 | 2.56 | |
| Botebo ba ho Sintering** | g/cm³ | 3.88 | 3.93 | 3.94 | 3.93 | 3.88 | 3.77 | 3.22 | |
| Sekhahla sa ho Fokotseha ha Mohala oa ho Sintering** | % | 17 | 17 | 18 | 18 | 15 | 12 | 7 | |
* MgO ha e kenyelelitsoe palong ea bohloeki ba Al₂O₃.
* Ha ho phofo ea sekala 29.4MPa (300kg/cm²), mocheso oa sintering ke 1600°C.
AES-11 / 11C / 11F: Eketsa 0.05 ~ 0.1% MgO, ho tsitsa ha eona ho babatseha, kahoo e sebetsa ho li-ceramics tsa aluminium oxide tse nang le bohloeki ba ho feta 99%.
AES-22S: E tšoauoa ka ho ba le sebopeho se phahameng le sekhahla se tlase sa ho fokotseha ha mohala oa sintering, e sebetsa ho thellela foromo ea ho lahla le lihlahisoa tse ling tse kholo tse nang le ho nepahala ho hlokahalang ha litekanyo.
AES-23 / AES-31-03: E na le sebopeho se phahameng, thixotropy le viscosity e tlase ho feta AES-22S. ea pele e sebelisetsoa li-ceramic ha ea morao e sebelisoa e le sesebelisoa sa ho fokotsa metsi bakeng sa thepa e thibelang mollo, e leng se etsang hore e ratoe haholo.
♦Litšobotsi tsa Silicon Carbide (SiC)
| Litšobotsi tse Akaretsang | Bohloeki ba likarolo tse ka sehloohong (boima ba%) | 97 | |
| 'Mala | Botsho | ||
| Botenya (g/cm³) | 3.1 | ||
| Ho monya metsi (%) | 0 | ||
| Litšobotsi tsa Mekaniki | Matla a ho tenyetseha (MPa) | 400 | |
| Modulus e monyane (GPa) | 400 | ||
| Bothata ba Vickers (GPa) | 20 | ||
| Litšobotsi tsa Thermal | Mocheso o phahameng ka ho fetisisa oa ts'ebetso (°C) | 1600 | |
| Koefficient ea katoloso ea mocheso | RT~500°C | 3.9 | |
| (1/°C x 10-6) | RT~800°C | 4.3 | |
| Ho tsamaisa mocheso (W/mx K) | 130 110 | ||
| Khanyetso ea ho thothomela ha mocheso ΔT (°C) | 300 | ||
| Litšobotsi tsa Motlakase | Ho hanyetsa molumo | 25°C | 3 x 106 |
| 300°C | - | ||
| 500°C | - | ||
| 800°C | - | ||
| Phetoho ea dielectric | 10GHz | - | |
| Tahlehelo ea dielektri (x 10-4) | - | ||
| Q Factor (x 104) | - | ||
| Motlakase oa ho senyeha ha dielectric (KV/mm) | - | ||
♦Sesepa sa Silicone Nitride
| Thepa | Yuniti | Si₃N₄ |
| Mokhoa oa ho Sila | - | Khatello ea Khase e Sintered |
| Botenya | g/cm³ | 3.22 |
| 'Mala | - | Bohlooho bo Lefifi |
| Sekhahla sa ho Monya Metsi | % | 0 |
| Modulus e Mocha | Gpa | 290 |
| Boima ba Vickers | Gpa | 18 - 20 |
| Matla a Khatello | Mpa | 2200 |
| Matla a ho Koba | Mpa | 650 |
| Ho khanna ha mocheso | W/mK | 25 |
| Khanyetso ea Thermal Shock | Δ (°C) | 450 - 650 |
| Mocheso o phahameng ka ho fetisisa oa ho sebetsa | °C | 1200 |
| Ho hanyetsa molumo | Ω·cm | > 10 ^ 14 |
| Dielectric Constant | - | 8.2 |
| Matla a Dielectric | kV/mm | 16 |