Bethe ea granite ke karolo ea bohlokoa lisebelisoa tse fapaneng tsa semiconductor. Jwalo ka thepa e tsitsitseng haholo le e tiileng, granite e sebelisoa haholo e le motheo oa lisebelisoa tsa ts'ebetso ea semiconductor. E khetholloa ka coefficient ea eona ea katoloso e tlase ea mocheso, botsitso bo phahameng ba litekanyo, le thepa e ntle ea mechini. Ka lebaka la litšobotsi tsena, bethe ea granite e sebelisoa haholo mefuta e meraro e fapaneng ea lisebelisoa tsa semiconductor - lisebelisoa tsa metrology, lisebelisoa tsa lithography, le lisebelisoa tsa tlhahlobo.
Lisebelisoa tsa Metrology li sebelisetsoa ho lekanya le ho lemoha litekanyo tsa bohlokoa tsa lisebelisoa tsa semiconductor. Li bapala karolo ea bohlokoa ho bolokeng boleng le botsitso ba ts'ebetso ea tlhahiso ea semiconductor. Lisebelisoa tsa Metrology li kenyelletsa lisebelisoa tse kang li-microscope tsa optical, li-microscope tsa elektrone, le li-microscope tsa matla a athomo (AFMs). Kaha ts'ebetso ea lisebelisoa tsena tsa ho lekanya e itšetlehile ka botsitso ba tsona, ho nepahala le ho hanyetsa ho thothomela, granite ke khetho e ntle bakeng sa thepa ea tsona ea bethe. Ho tšoana le botsitso ba bethe ea granite ho fana ka sethala se tsitsitseng bakeng sa lisebelisoa, e leng se ntlafatsang ho nepahala le ts'epo ea tsona.
Lisebelisoa tsa Lithography li sebelisetsoa ho etsa lipaterone tsa microchip holim'a wafer. Ts'ebetso ea lithography e hloka boemo bo phahameng ba ho nepahala le ho nepahala ho theha lipotoloho tse rarahaneng le ho ntlafatsa ts'ebetso ea chip. Lisebelisoa tsa lithography li kenyelletsa litsamaiso tsa stepper le scanner tse sebelisang leseli ho fetisetsa litšoantšo ho wafer. Kaha ts'ebetso ea lithography e na le kutloelo-bohloko haholo ho thothomelo le liphetoho tsa mocheso, bethe ea boleng bo holimo ea hlokahala ho netefatsa botsitso le ho pheta-pheta ha ts'ebetso ea lithography. Libethe tsa granite li fana ka botsitso bo hlokahalang le ts'ebetso e thata ea ho thothomela bakeng sa litsamaiso tsa lithography. Bethe ea granite e lumella sistimi ea stepper kapa scanner ho boloka likamano tse nepahetseng tsa sebaka tse netefatsang ho nepahala ho hoholo le boleng ba ho qetela ba sehlahisoa.
Lisebelisoa tsa tlhahlobo li sebelisetsoa ho lemoha liphoso life kapa life lisebelisoa tsa semiconductor. Lisebelisoa tsa tlhahlobo li kenyelletsa litsamaiso tse kang li-microscope tsa laser scanning, li-microscope tsa elektrone, le li-microscope tsa optical. Kaha ho hlokahala hore lisebelisoa tsena li nepahale haholo, li tsitse ebile li hanela ho thothomela, libethe tsa granite ke thepa e phethahetseng. Thepa ea mechine ea granite le botsitso ba boholo bo thusa ho aroleng ho thothomela, e leng se ntlafatsang ho nepahala ha tlhahiso ea lisebelisoa tsa tlhahlobo.
Qetellong, bethe ea granite e bohlokoa indastering ea semiconductor 'me e sebelisoa haholo mefuteng e fapaneng ea lisebelisoa. Thepa ea eona e ikhethang joalo ka botsitso ba litekanyo, coefficient e tlase ea katoloso ea mocheso, le botsitso bo botle ba mechini e etsa hore granite e be khetho e ntle bakeng sa thepa ea bethe ea lisebelisoa tsa semiconductor. Kaha bethe ea granite ea boleng bo holimo e fana ka botsitso bo hlokahalang, ho nepahala, le ho hanyetsa ho thothomela ha lisebelisoa tsa semiconductor, qetellong e ntlafatsa boleng ba sehlahisoa sa ho qetela. Ka hona, tšebeliso ea bethe ea granite lisebelisoa tsa semiconductor e tla tsoela pele ka lilemo tse tlang.
Nako ea poso: Mmesa-03-2024