Tataiso ea Khalase e Nepahetseng: Ho Kenya le ho Hlokomela SOP ho tloha Bophahamong ≤0.005 mm/m ho ea Taolong ea Tšilafalo

Liindastering tse nang le ho nepahala ho hoholo joalo ka tlhahiso ea semiconductor, lisebelisoa tsa optical, le tlhahiso ea liphanele tsa ponts'o, litsamaiso tsa motsamao li hloka boreleli bo ikhethang, botsitso ba jeometri, le bohloeki ba tikoloho. Litsela tsa tataiso tsa khalase e nepahetseng li ntse li sebelisoa ka ho eketsehileng ka lebaka la ho ba bataletse ho hoholo, ho hanyetsa ho tsofala, le botsitso ba mocheso. Leha ho le joalo, ho kenngoa ho sa lokelang kapa tlhokomelo e sa lekaneng ho ka lebisa kapele ho ho thella ho nepahetseng, tšilafalo ea bokaholimo, mengoapo le nako e jang chelete e ngata ea ho sebetsa.

Sehlopha sa ZHONGHUI se fana ka SOP e tloaelehileng ea ho Kenya le ho Hlokomela ho thusa bahlahisi ho fihlela ho batalla ≤0.005 mm/m ha ba ntse ba netefatsa ts'epo ea ts'ebetso ea nako e telele.

1. Hobaneng Litataiso tsa Khalase tse Hlokahalang li Hloka Li-SOP tse Tiileng

Ha ho bapisoa le literene tsa tataiso tsa tšepe, litsela tsa tataiso tsa khalase li fana ka:

• Ho nepahala ha jeometri ho phahameng haholo

• Phetoho e tlase ea mocheso

• Boreleli bo botle ba bokaholimo

• Botsitso bo matla ba lik'hemik'hale

Leha ho le jwalo, thepa ya khalase e angwa habonolo ke ho jara dintlha, dikarolwana tse silafatsang, le ho se tshwarwe hantle, e leng se etsang hore mekgwa e hlophisehileng e be bohlokwa.

2. Lintho tsa Bohlokoa tsa ho Kenya

2.1 Tlhokahalo ea ho ba le sephara

Ho netefatsa ho nepahala ha motsamao:

• Bophahamo ba ho kenya bo lokela ho ba ≤0.005 mm/m

• Meaho ea motheo e lokela ho etsoa esale pele 'me e imolloe khatellong ea maikutlo

• Tšehetso e sa lekanang e lebisa liphosong tsa ho fetoha ha sebopeho le ho beha maemo sebakeng se itseng.

Mekhoa e Khothaletsoang ea ho Fumana:

• Interferometry ea laser

• Maemo a elektroniki

• Li-straighted edges tse nepahetseng tse nang le li-feeler gauges

2.2 Tikoloho ea Mocheso o sa Feleng

Ho feto-fetoha ha mocheso ke sesosa se seholo sa ho kheloha ha sebopeho sa jeometri.

Maemo a Tikoloho:

• Taolo ea mocheso: 20 ± 1 °C

• Mongobo: 40–55%

• Qoba ho phalla ha moea ka kotloloho holim'a libaka tse tataisang

Maemo a tikoloho a tsitsitseng a fokotsa ho se tsamaisane ha katoloso ya mocheso pakeng tsa meaho e kenngwang le dikarolo tsa khalase.

2.3 Tsamaiso le Lipalangoang

Ho sebetsana ka tsela e sa lokelang ho ka baka mapetso a manyane kapa ho phatloha ha moedi.

Mekhoa e Molemohali:

• Sebelisa lisebelisoa tsa ho phahamisa ka vacuum kapa litšehetso tse bonolo tsa sling

• Qoba ho kopana le tšepe holim'a libaka tse nepahetseng

• Boloka tšehetso e otlolohileng ho thibela khatello ea maikutlo e kobehang

• Sephutheloana se sa thekeseleng nakong ea lipalangoang

2.4 Mekhoa ea ho Hloma le ho Lokisa

• Sebelisa matla a ho tlama a ajoang ka mokhoa o ts'oanang

• Qoba ho tsepamisa maikutlo khatellong ea maikutlo sebakeng seo

• Kenya li-pad tsa ho itšehla thajana tse tenyetsehang moo ho hlokahalang

• Tiisa liboutu ka tsela e otlolohileng le butle-butle ho thibela ho sotha

Ho se lokisoe hantle ke e 'ngoe ea lisosa tsa mantlha tsa ho kheloha ha sephara kamora ho kenngoa.

3. Mekhoa e Tloaelehileng ea Ts'ebetso ea Tlhokomelo (SOP)

3.1 Lisebelisoa le Baemeli ba ho Hloekisa ba Amohetsoeng

Litsela tsa khalase tse tataisang li hloka mekhoa ea ho hloekisa e sa senyeheng.

Lisebelisoa tse Khothaletsoang:

• Li-wipes tsa microfiber tse se nang lint

• IPA (Isopropyl Alcohol) kapa lihlatsoi tsa khalase tse sa nke lehlakore

• Liborashe tse khahlanong le ho tsitsa

Qoba:

• Li-solvent tse nang le asiti kapa alkaline

• Li-scraper tsa tšepe kapa masela a khorofo

• Moea o nang le khatello e phahameng o fokang litšila ka ho toba

3.2 Makgetlo a Tlhahlobo

Liteko tsa kamehla li lokela ho kenyelletsa:

• Tšilafalo ea bokaholimo

• Ho lemoha ho qaqa ha micro-scratch tlasa mabone a sekametseng

• Netefatso ea ho batalla hape

• Ho nepahala ha ho hokahanya

3.3 Likoahelo tse Sireletsang le Thibelo ea Lerōle

Likaroloana tse tsamaeang moeeng ke tšokelo e kholo litsamaisong tsa ho tsamaea ka nepo.

Mehato ea Tšireletso:

• Likoahelo tse sireletsang tsa telescopic

• Lithako tse bonolo tsa bellows

• Tšireletso ea moea o hloekileng ea khatello e ntle

• Lifilimi tse thibelang lerole tse sa fetoheng

Litharollo tsena li fokotsa likotsi tsa tšilafalo haholo 'me li eketsa nako ea tšebeletso.

4. Tlhahlobo ea Flatness le Netefatso ea Nepahalo

Netefatso ea kamehla e netefatsa ts'epo ea ts'ebetso.

Mekhoa ea Tlhahlobo:

• 'Mapa oa interferometer oa laser

• Sistimi ea Autocollimator

• Li-sensor tsa ho falla tse nepahetseng haholo

Haeba ho batalla ho feta mamello:

• Batalatsa motheo hape

• Hlahloba kabo ea khatello ea ho kenya

• Hlahloba tšilafalo libakeng tsa tšehetso

5. Lintlha tse Tloaelehileng tsa Bohloko ba Ts'ebetso le Litharollo

Bothata ba 1: Ho Tsamaya ka ho Nepahetseng

Sesosa: Phapang ea mocheso, tšehetso e sa lekanang
Tharollo: Tikoloho e laoloang + tlhahlobo-bocha ea nako le nako

Bothata ba 2: Tšilafalo ea bokaholimo le mengoapo

Sesosa: Likaroloana tse fofang moeeng, lisebelisoa tse sa lokelang tsa ho hloekisa
Tharollo: Mekhoa ea ho hloekisa le thepa ea ho hloekisa e amohetsoeng

Bothata ba 3: Nako e sa Lebelloang ea ho se be teng ha Lisebelisoa

Lebaka: Ho senyeha kapa ho hloleha ho lokisa tsela ea tataiso
Tharollo: Kemiso ea tlhahlobo ea thibelo + tšireletso e sireletsang

6. Likopo tse Loketseng

Litsela tsa tataiso tsa khalase e nepahetseng li sebelisoa haholo ho:

• Lisebelisoa tsa Tlhahiso ea Semiconductor

• Tlhahlobo ea Optical le Mekhoa ea Metrology

• Methapo ea Tlhahiso ea Pontšo ea Panel e Tšoarellang

Liindasteri tsena li rua molemo ka motsamao o boreleli haholo oa litsela tsa khalase, ho sotha mocheso ho fokolang, le ho lumellana ho hoholo ha tikoloho.

Qetello

Ho fihlella ho batalla ha ≤0.005 mm/m ke ntlha ea pele feela bakeng sa ts'ebetso ea setataiso sa khalase ka nepo. Mekhoa e nepahetseng ea ho kenya le litsamaiso tsa tlhokomelo tse laoloang ke tšilafalo li bohlokoa bakeng sa ho boloka ho nepahala ha nako e telele.

Ka ho kenya tshebetsong di-SOP tse tloaelehileng, bahlahisi ba ka:

✔ Thibela ho kheloha ho nepahetseng
✔ Fokotsa tšilafalo le tšenyo ea bokaholimo
✔ Fokotsa nako ea phomolo e sa reroang
✔ Eketsa bophelo ba tšebeletso ea litsamaiso tsa ho sisinyeha ka nepo

Sehlopha sa ZHONGHUI (ZHHIMG) se fana ka likarolo tsa sebopeho tse nepahetseng haholo le li-platform tsa motsamao tse entsoeng bakeng sa liindasteri tse hlokang tlhokomelo e kholo lefatšeng.