Granite e 'nile ea sebelisoa haholo indastering ea semiconductor ka lebaka la thepa ea eona e ntle ea mechine, botsitso ba mocheso, le coefficient e tlase ea katoloso ea mocheso. Leha ho le joalo, ka tlhoko e ntseng e eketseha ea ho nepahala le tlhahiso e phahameng, lisebelisoa tse ling li hlahile e le likhetho tse sebetsang bakeng sa tlhahiso ea likarolo tsa lisebelisoa tsa semiconductor. Sehloohong sena, re tla hlahloba tse ling tsa lisebelisoa tse ling bakeng sa likarolo tsa granite lisebelisoa tsa semiconductor le ho bapisa melemo le mefokolo ea tsona.
Lisebelisoa tse ling bakeng sa Likarolo tsa Granite
1. Lisebelisoa tsa khalase-serame
Lisebelisoa tsa khalase-serame, tse kang Zerodur le Cervit, li sebelisitsoe haholo indastering ea semiconductor ka lebaka la coefficient ea tsona e tlase ea katoloso ea mocheso, e batlang e tšoana le ea silicon. Ka lebaka leo, lisebelisoa tsena li ka fana ka botsitso bo betere ba mocheso le ho nepahala ho ntlafetseng ts'ebetsong ea tlhahiso ea semiconductor. Zerodur, haholo-holo, e na le homogeneity le botsitso bo phahameng, e leng se etsang hore e lokele tlhahiso ea lisebelisoa tsa lithography.
Melemo:
- Koefficient e tlase ea katoloso ea mocheso
- Ho nepahala ho hoholo le botsitso
- E loketse lits'ebetso tsa mocheso o phahameng
Mathata:
- Litšenyehelo tse phahameng ha li bapisoa le granite
- E fokola hanyane, e ka baka mathata mosebetsing oa ho sebetsa le ho e sebetsana
2. Lisebelisoa tsa letsopa
Lisebelisoa tsa letsopa, tse kang aluminium oxide (Al2O3), silicon carbide (SiC), le silicon nitride (Si3N4), li na le thepa e ntle ea mechini, khanyetso ea mocheso o phahameng, le coefficient e tlase ea katoloso ea mocheso. Thepa ena e etsa hore letsopa e be le loketseng likarolo tsa lisebelisoa tsa semiconductor tse hlokang botsitso bo phahameng ba mocheso le ho nepahala, joalo ka mekhahlelo ea wafer le li-chuck.
Melemo:
- Botsitso bo phahameng ba mocheso le matla
- Koefficient e tlase ea katoloso ea mocheso
- Ho hanyetsa ho tsofala haholo le ho se sebetse hantle ha lik'hemik'hale
Mathata:
- E ka robeha habonolo mme ea petsoha habonolo, haholo-holo nakong ea ho sebetsa le ho sebetsa
- Ho lokisa le ho bentsha letsopa ho ka ba thata ebile ho nka nako e ngata
3. Litšepe
Lisebelisoa tse entsoeng ka tšepe, tse kang tšepe e sa ruseng le titanium, li 'nile tsa sebelisoa bakeng sa likarolo tse ling tsa lisebelisoa tsa semiconductor ka lebaka la bokhoni ba tsona bo botle ba ho sebetsa le matla a phahameng. Li sebelisoa hangata lits'ebetsong moo ho sa hlokeheng botsitso bo phahameng ba mocheso, joalo ka likarolo tsa kamore, likhokahano le li-feedthroughs.
Melemo:
- Ho sebetsa hantle le ho tjheseletsa
- Matla a phahameng le ho se sebetse hantle
- Theko e tlase ha e bapisoa le tse ling tsa thepa e 'ngoe
Mathata:
- Koefficient e phahameng ea katoloso ea mocheso
- Ha e loketse lits'ebetso tsa mocheso o phahameng ka lebaka la mathata a katoloso ea mocheso
- E kotsing ea ho bola le ho silafala
Qetello:
Ka bokhutšoanyane, leha granite e bile khetho e tsebahalang bakeng sa likarolo tsa lisebelisoa tsa semiconductor, ho hlahile lisebelisoa tse ling, e 'ngoe le e 'ngoe e na le melemo le mathata a ikhethang. Lisebelisoa tsa khalase-ceramic li nepahetse haholo ebile li tsitsitse empa li ka robeha habonolo. Lisebelisoa tsa letsopa li matla 'me li na le botsitso bo botle ba mocheso empa li ka boela tsa robeha habonolo, e leng se etsang hore li be thata ho li etsa. Litšepe ha li theko e tlase, li ka sebelisoa ka mochini, 'me li ductile, empa li na le coefficient e phahameng ea katoloso ea mocheso 'me li kotsing ea ho bola le ho silafala. Ha u khetha lisebelisoa tsa lisebelisoa tsa semiconductor, ho bohlokoa ho nahana ka litlhoko tse khethehileng tsa ts'ebeliso le ho khetha lisebelisoa tse leka-lekaneng litšenyehelo, ts'ebetso le ts'epo.
Nako ea poso: Hlakubele-19-2024