Mekhoa ea ho sisinyeha ka nepo e phahameng ke ea bohlokoa tlhahisong ea theknoloji e phahameng ea sejoale-joale, haholo-holo ho lithography ea semiconductor, tlhahlobo ea wafer, alignment ea optical, le metrology ea nanometer-scale. Motheong oa mekhoa ena ho na le phephetso ea bohlokoa ea boenjiniere: ho fihlella motsamao o boreleli, o se nang khohlano, le o ka phetoang haholo ntle le phoso e bakoang ke ho kopana ha mechine.

Theknoloji ea ho jara moea, ha e kopantsoe le botsitso bo phahamengmeaho ea granite, e fana ka e 'ngoe ea litharollo tse tsoetseng pele ka ho fetisisa phephetsong ena. Sistimi ea ho jara moea ea granite e nkela sebaka sa khokahano ea setso ea mechine ea ho phutholla kapa ho thella ka filimi e tšesaane ea moea o hatelletsoeng sebaka, e nolofalletsang motsamao oa khohlano o batlang o le lefela le ho nepahala ho ikhethang ha jeometri.

Libakeng tse tsoetseng pele tsa tlhahiso, lik'hamphani tse kang ZHHIMG li kopanya metheo ea granite e nang le bongata bo phahameng le likarolo tse nang le moea o nang le boqapi bo nepahetseng ho fihlela litsamaiso tsa motsamao tse khonang ho laola boemo ba sub-micron esita le nanometer.

1. Molao-motheo oa Motheo oa Theknoloji ea ho Jara Moea

Li-bearing tsa moea li sebetsa ho latela molao-motheo oa karohano e matla ea mokelikeli. Ho e-na le ho lumella libaka tse peli tse tiileng ho kopana, lera le laoloang la moea o hatelletsoeng le kenngoa lipakeng tsa tsona.

1.1 Sebopeho sa Filimi ea Moea

Sistimi e tloaelehileng ea ho jara moea e na le:

• Motheo oa granite o sa sisinyeheng
• Koloi e tsamaeang kapa sethala
• Li-nozzle tsa moea tse nepahetseng kapa mecha ea phatlalatso e nang le masoba
• Sistimi ea phepelo ea moea e laoloang

Moea o hatelletsoeng o kenngoa ka li-micro-orifice kapa thepa ea letsopa e nang le masoba, e leng se etsang filimi e tšesaane e atisang ho ba bolelele ba li-micrometer tse 2 ho isa ho tse 20.

Filimi ena ea moea e tšehetsa mojaro 'me e felisa ho kopana ka ho toba le mechine.

1.2 Mekaniki ea ho Kopana le Zero

Ho fapana le dibering tsa bolo kapa ditataiso tse otlolohileng, dibering tsa moya di sebetsa ka mokgwa oo:

• Koefficient ea khohlano e atamela lefela
• Ho tsofala ho tlosoa ka khopolo-taba
• Ho sisinyeha ha thupa ha ho eo

Sena se etsa hore di-air bearing e be tse loketseng bakeng sa ditsamaiso tsa ho beha maemo ka nepo haholo moo ho se amohelehe ha hysteresis ya mechini.

1.3 Boitšoaro ba Phallo ea Laminar

Tshebetso ya di-air bearing e itshetlehile haholo hodima botsitso ba phallo ya laminar. Pherekano e hlahisa:

• Ho feto-fetoha ha khatello
• Ho se tsitse ha maemo
• Lerata le eketsehileng litsamaisong tsa ho lekanya

Ka hona, moralo o nepahetseng oa ho jara moea o hloka ntlafatso ea matla a mokelikeli oa lik'homphieutha (CFD) ho netefatsa kabo e tsitsitseng ea phallo holim'a bokaholimo ba ho jara.

2. Karolo ea Granite ho Litsamaiso tsa ho Jara Moea

Granite ha se feela thepa e tšehetsang sebopeho; ke karolo e sebetsang ea sistimi ea motsamao.

2.1 Ho Tsitsa ha Sebopeho

Granite e ntšo e nang le bongata bo phahameng e fana ka:

• Modulus e phahameng ea botsitso ba elasticity
• Botšepehi ba nako e telele
• Ho hanyetsa phetoho tlas'a mojaro

Matlotlo ana a bohlokoa hobane di-air bearing di itshetlehile ka ho boloka bophahamo ba sekgeo bo lekanang hodima sebaka sohle sa maeto.

2.2 Ho Tsitsisa Thempereichara le Taolo ea ho Tsamaisa

Ho kheloha ha mocheso ke e 'ngoe ea mehloli e meholo ea liphoso litsamaisong tsa ho tsamaea ka nepo.

Granite e na le:

• Koefficient e tlase ea katoloso ea mocheso (~4–7 × 10⁻⁶ /°C)
• Ho hloka mocheso o phahameng
• Ho ata ha gradient ea mocheso butle-butle

Sena se fokotsa:

• Ho sekama ha sethala ka lebaka la ho futhumala ho sa lekanang
• Ho kheloha ha Z-axis ka litekanyo tsa nako e telele
• Liphoso tsa ho hokahanya litsamaisong tsa optical

2.3 Ho Thibela ho Thothometsa ha Thothomelo

Ho damping ha Granite ka tlhaho ho fokotsa phetiso ya ho thothomela ha maqhubu a hodimo ho tswa mehloding e kantle e kang:

• Ho thothomela ha mokatong
• Lisebelisoa tsa ho sebetsa tse haufi
• Mekhoa ea ho sebetsana le moea

Sena se bohlokoa bakeng sa ho boloka botsitso ba boemo lits'ebetsong tsa nanometer.

3. Meralo ea Sistimi ea Li-platform tsa Granite Air Bearing

Sistimi e tloaelehileng ea ho jara moea ea granite e kopanya litsamaiso tse nyane tsa mechine, tsa pneumatic le tsa taolo.

3.1 Sebopeho sa Mekaniki

Likarolo tsa bohlokoa:

• Sethala sa motheo sa granite
• Literei tsa ho sisinyeha ha mobu ka nepo
• Li-pad tse nang le moea (tse nang le masoba a letsopa kapa mofuta oa lesoba)
• Kopano ea sethala e tsamaeang

Bophara ba motheo oa granite hangata bo laoloa ho ea maemong a micron kapa a sub-micron ho latela sehlopha sa ts'ebeliso.

3.2 Sistimi ea Taolo ea Pneumatic

Sistimi ea phepelo ea moea e kenyelletsa:

• Konpresser ea moea e nang le khatello e phahameng
• Balaoli ba ho nepahala
• Lithibelo tsa phallo
• Diyuniti tsa ho sefa (ho tlosa oli, mongobo, dikarolwana)

Esita le tšilafalo e nyane e ka ama botsitso ba libere haholo.

3.3 Mekhoa ea ho Fetola Maikutlo le Taolo

Litsamaiso tsa maemo a holimo lia kopanngoa:

• Li-interferometer tsa laser
• Li-encoder tse otlolohileng
• Li-sensor tsa ho falla tse nang le bokhoni

Mekhoa ena e lumella taolo ea motsamao oa selika-likoe se koetsoeng ka qeto ea nanometer-scale.

4. Metrology le Tshebetso e Nepahetseng

Litsamaiso tsa ho jara moea li hlahlojoa ho latela liparamente tse 'maloa tsa bohlokoa tsa metrology.

4.1 Ho Otloloha le ho ba Sephara

Liphoso tsa ho otloloha hangata li hlaha ho:

• Ho kheloha ha motheo oa granite
• Phapang ea botenya ba filimi ea moea
• Ho se leka-lekane ha kabo ea mojaro

Litsamaiso tsa maemo a holimo li ka finyella:

• Ho otloloha ha sub-micron holim'a maeto a tekanyo ea mithara
• Ho pheta-pheta ha boemo ba nanometer libakeng tse laoloang

4.2 Ho nepahala ha Sebaka

Ho nepahala ha sebaka ho ipapisitse le:

• Qeto ea encoder
• Botsitso ba selika-likoe sa taolo
• Ho thatafala ha filimi ea moea

Ho fapana le litsamaiso tsa mechini, li-air bearing li felisa ho thiba ka ho feletseng.

4.3 Ho Tiea ha Matla

Ho thatafala ha matla ho hlalosa kamoo tsamaiso e arabelang kateng matleng a kantle.

Pontšo ea libere tsa moea:

• Ho thatafala ho hoholo maqhubung a tlase
• Ho satalla ho fokotsehile maqhubung a phahameng ka lebaka la ho hatelloa ha moea

Phehisano ena e laolwa ka moralo oa sistimi le ntlafatso ea ho kenya lintho esale pele.

5. Likopo tsa Liindasteri

Mekhoa ea ho jara moea ea granite e sebelisoa haholo mafapheng a tsoetseng pele a tlhahiso.

5.1 Indasteri ea Semiconductor

Likopo li kenyelletsa:

• Mehato ea tlhahlobo ea wafer
• Mekhoa ea ho hokahanya lithography
• Sebaka sa ho beha maske ea foto

Mekhoa ena e hloka ho pheta-pheta ha boemo ba nanometer.

5.2 Optics e Nepahetseng

E sebelisoa ho:

• Sistimi ea ho hokahanya lilense
• Sebaka sa mahlaseli a laser
• Litlhophiso tsa tekanyo ea interferometric

5.3 Metroloji e Kopanetsoeng

Li-platform tsa granite tse nang le moea li sebelisoa ho:

• Mekhoa ea CMM ea maemo a holimo
• Mechini ea ho lekanya ea likhokahano tsa optical
• Mekhoa ea tlhahlobo ea li-sensor tse ngata

5.4 Tlhahiso e Tsoetseng Pele

Ho kenyeletsoa:

• Mekhoa ea ho etsa mechini e menyenyane
• Li-platform tsa ho sebetsana le laser tsa Femtosecond
• Mekhoa ea ho lekanya tlhahiso ea tlatsetso

6. Liphephetso tsa Kopanyo ea Lintho tse Hlokahalang

Ho rala sistimi ea ho jara moea ea granite ho kenyelletsa mekhoa e mengata ea boenjiniere.

6.1 Litlhoko tsa Bokaholimo bo bataletseng

Li-bearing tsa moea li hloka kabo e lekanang haholo ea sekheo sa moea. Ho kheloha leha e le hofe ha granite ho ama ka ho toba:

• Kabo ea mojaro
• Ho boreleli ha motsamao
• Ho nepahala ha sebaka

6.2 Kutloisiso ea Phepelo ea Moea

Tshebetso ya sistimi e ela hloko:

• Botsitso ba khatello
• Ho tšoana ha phallo
• Maemo a litšila

Esita le dikarolwana tsa micron-scale di ka sitisa diphetoho tsa phallo ya moya.

6.3 Sehokelo sa Thermal-Mechanical

Katoloso ea granite le likarolo tsa sebopeho ka mocheso e tlameha ho bapiswa ka hloko ho thibela:

• Ho sekama sethaleng
• Ho kheloha ha Z-axis
• Ho sotha ha jeometri

7. Mekhoa ea Tlhahiso le Tekanyo

Mekhoa ea ho jara moea ea granite e nepahetseng haholo e hloka libaka tse laoloang tsa tlhahiso.

Mehato e tloaelehileng ea ts'ebetso e kenyelletsa:

1. Mochini o thata oa granite
2. Lipotoloho tsa ho tsitsisa mocheso
3. Ho sila le ho lahlela ka nepo
4. Kopano ea ho jara moea
5. Netefatso ea Metrology
6. Ho lokisa tekanyo ea laser

Bahlahisi ba tsoetseng pele ba kang ZHHIMG ba sebelisa libaka tse laoloang tse nang le botsitso ba mocheso hangata bo ka hare ho ±1°C ho netefatsa ho nepahala ha jeometri ho ka phetoa.

8. Melemo ho feta Mekhoa ea ho Bearing ea Mechini

Li-air bearing li felisa lithibelo tse ngata tsa motheo tsa litsamaiso tsa mechini.

Qetello

Mekhoa ea ho jara moea ea granite e emela e 'ngoe ea litharollo tse tsoetseng pele ka ho fetisisa bakeng sa taolo ea motsamao o nepahetseng haholo tlhahisong ea sejoale-joale. Ka ho kopanya botsitso ba sebopeho sa granite e nang le bongata bo phahameng le litšobotsi tse se nang khohlano tsa karohano ea filimi ea moea, litsamaiso tsena li fihlella maemo a ikhethang a ho nepahala, ho pheta-pheta le botsitso ba nako e telele.

Ha liindasteri tsa semiconductor le tsa boenjiniere ba ho nepahala li ntse li tsoela pele ho sutumelletsa ho mamellana ha nanometer esita le sub-nanometer, li-platform tsa granite air bearing li tla lula e le theknoloji ea bohlokoa e nolofalletsang bakeng sa metrology le litsamaiso tsa tlhahiso tsa moloko o latelang.