Tlhahiso ea likarolo tsa sebopeho tse nepahetseng haholo e hloka ho feta mechine e tsoetseng pele ea CNC. Ntle le ho aroloa ka thata ho tloha ho sisinyeho ea tikoloho le ho thothomela ha indasteri, ho fihlella mamello ea geometri ea sub-micron ho ke ke ha khoneha. Koloi e 'ngoe le e 'ngoe e fetang, crane e haufi e fetang, le compressor ea taolo ea tlelaemete li hlahisa maqhubu a micro-siism a ka senyang ho lahlela le ho lekanya metheo ea granite e nepahetseng, li-air bearing, le likarolo tsa ceramic.
Ho fokotsa sena, mehaho ea indasteri e tlameha ho tšoara sebaka sa tlhahiso e le karolo e kopaneng ea sistimi ea metrology.
Fisiks ea ho Tiisa Motheo
Mabato a tloaelehileng a konkreite a indasteri hangata a bophara ba 150 mm ho isa ho 300 mm. Leha a lekane bakeng sa thepa e tloaelehileng le kopano e boima, ha a lekane ka ho feletseng bakeng sa tlhahiso ea boemo ba nanometer. Tlas'a meroalo e matla, fatše e tloaelehileng e sebetsa joaloka diaphragm, e fetisetsa ho thothomela ha fatše ho nang le maqhubu a tlase ka ho toba ho li-workpiece.
Ho felisa vector ena ea liphoso, libaka tse tsoetseng pele tsa tlhahiso li kenya tšebetsong leano la meralo ea motheo e nang le mekhahlelo e mengata:
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Metheo e Metenya ka ho Fetisisa ea Sehlopha sa Sesole: Ho tšela konkreite e matlafalitsoeng botebong ba bonyane ba 1000 mm ho fana ka thibelo e kholo ea inertial. Boima bona bo kokobetsa maqhubu a maqhubu a tlase (1 - 10 Hz) pele a fihla mochining.
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Liforo tsa ho Isolate tsa Perimeter: Ho seha liforo tse ikhethileng tsa ho itlhoekisa ho potoloha libaka tsa tlhahiso—ka litekanyo tse nepahetseng tse kang bophara ba 500 mm le botebo ba 2000 mm—ho arola ka mokhoa o phethahetseng sebaka sa tlhahiso se nepahetseng ho tloha setsing se seng kaofela. Liforo tsena li tletse ka thepa e khethehileng ea elastomeric e monyang matla ho fokotsa maqhubu a shock a mahlakoreng.
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Ho Khutsisa Molumo le Mekaniki: Likereine tse kaholimo le li-gantry hoists ke mohloli o moholo oa lerata le tlase le ho thothomela ha sebopeho. Ho sebelisa litsamaiso tsa maeto tse tsamaeang ka holim'a acoustic tse ikhethileng tse thibelang maqhubu a khatello ea molumo ho sitisa maemo a elektroniki a bonolo le li-interferometer tsa laser nakong ea lipotoloho tsa tekanyo.
Kamano ea Tikoloho: Mocheso le Mongobo
Katoloso ea mocheso ke eona ntho e le 'ngoe e tlatsetsang haholo phosong ea jiometri hogranite e nepahetsengle tlhahiso ea letsopa. Phetoho ea mocheso ea 0.5 ℃ feela e ka etsa hore bethe ea granite ea 5000 mm e tenyetsehe ho feta mamello e lumelletsoeng.
Ho fihlela ho nepahala ho tsitsitseng, tikoloho ea ts'ebetso le kopano e tlameha ho latela liparamente tse tiileng:
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Kakaretso ea Tikoloho: Tlhahiso e lokela ho etsahala ka har'a likamore tse kholo tse koetsoeng tsa ho hloekisa (mohlala, 10,000㎡) moo mocheso o notleloang ho 20℃ ± 0.2℃ 'me mongobo o lekanyelitsoeng o laoloa ka thata.
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Tsamaiso ea Lebelo la Moea: Mekhoa ea ho phalla ha moea e lokela ho etsoa ho qoba ho phunya ha moea o otlolohileng, o lebelo le phahameng holim'a granite, ho thibela ho phahama ha mocheso sebakeng seo.
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Ketsiso ea Semiconductor Cleanroom: Kopano ea ho qetela ea li-gantries tsa granite tse nang le li-axis tse ngata, mekhahlelo ea li-motor tse otlolohileng, le li-air bearing tse nepahetseng haholo li hloka libaka tse ikhethileng, tse se nang lerōle tse etsisang lesela la semiconductor la mosebelisi oa ho qetela. Sena se netefatsa hore ha ho na litšila tse sitisang likheo tse jereng moea, tseo hangata li lekanyang pakeng tsa 5μm le 15μm.
Kakaretso
Tlhahiso e nepahetseng haholo e ke ke ea e-ba teng tikolohong e tloaelehileng ea indasteri. Botsitso ba mokatong oa fektheri, karohano ea metheo ea sebopeho, le taolo e felletseng ea thermodynamics ea kamore e hloekileng li theha motheo oa bokhoni ba metrological. Ho tsetela metheong e meholo ea inertial le karohano ea perimeter ke mokhoa o le mong feela o pakiloeng oa ho netefatsa hore tlhahiso ea sub-micron e lula e tsitsitse, e ka phetoa, 'me e ka latelloa.
Nako ea poso: Phuptjane-15-2026